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Prof. Pey 2018-10-21T05:14:34+00:00

Professor Pey Kin Leong

Associate Provost, (Education)

Singapore University of Technology and Design

Principal Investigator

Gate Oxide (GOx) Reliability Group

Singapore University of Technology and Design 

8 Somapah Road, Singapore – 487 372.


     Dr. Pey Kin Leong received his Bachelor of Engineering (1989) and Ph.D (1994) in Electrical Engineering from the National University of Singapore. He has held various research positions in the Institute of Microelectronics, Chartered Semiconductor Manufacturing, Agilent Technologies and National University of Singapore. He was previously Head of the Microelectronics Division, Program Director of the Si Technology Research group, Laboratory Supervisor of the Micro Fabrication Facility, and the Director of the Microelectronic Center in the School of Electrical & Electronics Engineering, Nanyang Technological University, Singapore, and holds a concurrent Fellowship appointment in the Singapore-MIT Alliance (SMA).

     Dr. Pey is a senior member of IEEE and an IEEE EDS Distinguished Lecturer, and has been the organizing committee member of IPFA since 1995. He was the General Chair of IPFA2001, Singapore and the co-General Chair of IPFA2004, Hsinchu, Taiwan. KL Pey was the Guest Editor of IEEE Transactions on Devices in and Materials Reliability in 2003-05 and 2007, and the Chair of the Singapore IEEE REL/CPMT/ED Chapter in 2004/05, and served on the 2006/07/08 IRPS technical subcommittee, and the IPFA’02 to IPFA’06 and IPFA’08 technical committee, and the 2007 IEDM CMOS & Interconnect Reliability and 2008 IEDM Characterization, Reliability and Yield sub-committee.

     Dr. Pey has published more than 185 international refereed publications (including 7 invited papers and one review article) and 159 technical papers at international meetings/conferences (including 24 invited talks and 17 papers in IEDM/IRPS), and holds 34 US patents. Dr. Pey has contributed significantly to the CMOS gate dielectric reliability, especially in the areas of physical analysis of ultra-thin dielectric breakdown mechanism.

Key Appointments

 03/2017 – present            Associate Provost (Education and SUTD Academy), Singapore University of Technology and Design, (SUTD)

01/2010 – 02/2017           Associate Provost (Education), SUTD

05/2012 – 05/2018           Acting Head, Science and Math Cluster, SUTD

05/2012 – 07/2014           Acting Head, Humanity, Arts and Social Science, SUTD

07/2010 – 08/2011           Acting Co-director, SUTD-MIT International Design Center

04/1999 – 06/2010           SMA Fellow, Advanced Materials Micro- and Nano-Systems Program, Singapore-MIT Alliance (SMA) & co-founder of the AMM&NS program in 1998.

01/2010 – 12/2011            Visiting Professor, Nanyang Technological University, Singapore

08/2008 – 12/2009          Full Professor, School of Electrical and Electronic Engineering (EEE), Nanyang Technological University, Singapore

04/2009 – 12/2009           Director, Nanyang NanoFabrication Center (N2FC), Nanyang Technological University, Singapore

01/2007 – 12/2009           Head, Microelectronics Division, School of EEE, NTU

02/2009                            Visiting Professor, Tokyo Institute of Technology, Japan

06/2006 – 06/2010         Visiting Scientist, MIT, USA

09/2007 – 2010                 Member, VLSI Committee IEEE Electron Device Society, USA

01/2005 – 2013                  Distinguished Lecturer, IEEE Electron Device Society, USA

06/2003 – 2011                  Faculty Associate, Institute of Microelectronics, Singapore

04/2005 – 12/2009           Director, Microelectronics Center, School of EEE, NTU

02/2002 – 7/2008              Associate Professor, School of EEE, Nanyang Technological University

10/2006 – 12/2006           Acting-Head, Microelectronics Division, School of EEE, NTU

09/2006 – 12/2006           Deputy-Head, Microelectronics Division, School of EEE, NTU

10/2000 – 01/2002           Engineering Manager, Wafer Yield Engineering, Agilent Technologies

07/2000 – 01/2002           Adjunct Fellow, National University of Singapore, Department of Electrical and Computing Engineering

07/2000 – 10/2000           Section Manager, Yield Engineering, Chartered Semiconductor Manufacturing, Singapore

08/1999 – 06/2000           Assistant Professor, National University of Singapore, Department of Electrical Engineering, Singapore

02/1998 – 07/1999           Lecturer, National University of Singapore, Department of Electrical Engineering, Singapore

01/1998 – 02/1998           Principal Engineer, Chartered Semiconductor Manufacturing, R&D Department

06/1997 – 01/1998           Adjunct Lecturer, National University of Singapore, Department of Physics

05/1996 – 12/1997           Senior Engineer, Chartered Semiconductor Manufacturing, R&D Department

06/1995 – 05/1996           Member of Technical Staff, Institute of Microelectronics, Failure Analysis and Reliability Department, Singapore

02/1993 – 05/1995           Research Engineer, Institute of Microelectronics, Failure Analysis and Reliability Department

03/1988 – 06/1988           Training Assistant, AT&T Microelectronics Singapore

03/1987 – 06/1987           Engineering Assistant, AVIMO Singapore

Honours, Awards and Appointments

2016                                  The Public Administration Medal (Silver), National Day Awards

10/2014 – present           Member, Management Board of Temasek Laboratories at SUTD

07/2012 – present           Chairman of Advisory Board, School of Electrical and Electronics Engineering, Singapore Polytechnic

02/2014 – present           Member, A*STAR BMRC Audit Committee

10/2015 – present           Member, Engineering Accreditation Board, Institute of Engineering, Singapore

05/2013 – present           Member, Advisory Panel, Building Construction Authority Academy

03/2012 – present           Vice Chairman, School Advisory Committee, Jurong Junior College

08/2018 – present           Editorial Board, Journal of Microelectronic Manufacturing

04/2018 – present           Distinguished Visiting Academician, Changi General Hospital

12/2017 – present           Vice-President, Higher Education Planning in Asia Association (HEPA)

07/2018 – present           Member, Advisory Committee, KEPCOTech of Korean Electric power Corporation (KEPCO)

2007 – present                  Judge, Micron Singapore Technical Seminar

01/2007 – present           Member, Panel of the external assessors of the Technical Career Ladder of Micron Semiconductor Asia Pte Ltd

2004 – present                  Board member, IEEE International Physical and Failure Analysis (IPFA) Symposium

05/2018 – 02/2019           Member, Advisory Board, International Conference on VLSI Device Architecture and Circuits

10/2015 – 10/2017           Member, Working Group Safety Health (WSH), Higher Education & Research, Workplace Safety & Health Council

07/2016                              Member, Exhibition Advisory Committee of Science Centre’s Engineering Exhibition

2016                                     Member, Steering Committee for the LTA Engineering Challenge for Sustainable Future Mobility

01/2015                              SUTD Long Service Award 2015

2015                                     National Advisory Committee, International Conference on Materials for Advanced Technology (ICMAT)

2014                                     Judge, President’s Technology Awards (PTA)

09/2010 – 09/2013           Member, Advisory Board, Zhejiang University Alumni Association Singapore

01/2013 – 01/2004           Member, Joint Council Office Career Development Award (CDA) Review Panel, A*STAR

2008 – 2010                       Adversary board member, Nano Asia conference

05/2008 – 07/2010           Member, Advisory Board of Energetic Research Institute, Singapore

05/2008 – 12/2009           Senate Member, Nanyang Technology University, Singapore

07/2007 – 02/2011           Member, A*STAR SERC Public Sector Funding Panel, Singapore

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